Real-time AMC Monitoring
Environics Group provides real-time monitoring of airborne molecular contamination (AMC) in semiconductor processing.
ENVI analyzers can detect hazardous chemical contaminants at far lower concentrations than traditional analyzers and react in real-time. This gives the operator a longer safe response window to take corrective action. In addition the ENVI analyzers can establish baseline standards for ambient environments and also sample from process tool air or nitrogen sources. It is the most effective method for monitoring pre and post filter efficiency as well as litho tool environments, bay-chase areas and mask storage areas.